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1. Turn on the cooling water switch, the air compressor switch (the red button of the air compressor is pulled up to open, and pressed down to close) and the main power switch of the coating machine.

2. Place the glass substrate in the sample holder, with the conductive side facing down, and the side of the etched tape close to the blue line of the sample holder.

3. Vent the pretreatment chamber. After the air is released, tighten the vent valve, open the pretreatment chamber door, place the sample holder on the push-pull rod, and close the door.

4. Turn on the mechanical A, mechanical B pumps and four vacuum gauges.

5. Substrate pretreatment: open the angle valve. When the vacuum degree of the pretreatment chamber reaches 2.0E1 ~ 5.0E1 (2.0×10～5.0×10)Pa, close the angle valve and open the angle valve of the vacuum evaporation chamber. Turn on the DC sputtering power supply, then press the start button, adjust the current 0.020-0.025*, bombard for 10 minutes, adjust the current to 0A, press the stop button, and turn off the power.

6. Open pump A and angle valve, and when the degree reaches below 4.0E0, that is, when the vacuum pressure on both sides is basically the same (about ten minutes), close the angle valve, valve A, and open the space between the evaporation chamber and the pretreatment chamber. Check the baffle under the rotating table, and make sure that the baffle is placed in the proper position. The sample is transferred to the evaporation chamber, and the sample holder is grasped by the manipulator and held on the manipulator; then the push-pull rod is pulled back to the pretreatment, and the gate valve is closed; the evaporation table is lowered to be flush with the manipulator, and the sample holder is gently Push into the sample holder guide groove (upper guide groove) under the evaporation table.

 7. When the vacuum degree of the evaporation chamber reaches 1.2E1 (1.2×10) Pa or less, close the angle valve and the mechanical A pump. Open the gate valve and evacuate the evaporation chamber to 7.0E-4Pa (about 2 hours).